In a last decade the surface local modification methods by scanning probe microscope actively have developed. There are several ways of the surface properties modification in a nanometer scale by AFM or STM means like, by mechanical scratching or by voltage impulses applying on a tip. The wide practical applications of probe lithography have been found based on anodization of a surface accelerated by the cantilever tip. The method of tip-induced oxidation of a metal and semiconductor surfaces starts to be used even for nanoelectronic devices creation [1,5]. 高性價(jià)比-多功能掃描探針顯微鏡（SPM）-原子力顯微鏡（AFM）