Spherical and irregular microparticles both in the size of 5mwere put into the de-ionizedwater respectively to form different suspensions, and vibrating cavitation experiments were performed in the two kinds of suspensions. After the experiment, the damages on the specimen surfaces were measured and free radicals in suspensionswere detected. Itwas found that suspensions with particles cause more severe cavitation erosion than those without particles. Compared with a spherical particle, the shape of the irregular particle has little effect on thenumber of the cavities, but it causes abrasion on the solid surface besides the cavitation erosion. 掃描探針顯微鏡(SPM/AFM/STM)