全文請(qǐng)?jiān)L問：
ZnO films were deposited on c-plane sapphire substrates by metal-organic chemical vapor deposition (MOCVD).Annea領(lǐng) treatments for asdeposited samples were performed in different atmosphere under various pressures in the same chamber just after growth.The effect of annea領(lǐng) atmosphere on the electrical,structural,and optical absorption measurements.The results indicated that the electrical and structural properties of the films were highly influenced by annea領(lǐng) atmosphere,which was more promounced for the films annealed in oxygen ambient. The most significant improvements for structural and electrical properties were obtained for the film annealed in oxygen under the pressure of 60 Pa.Under the optimum annea領(lǐng) condition,the lowest resistivity of 0.28 cm and the highest mobility of 19.6 cm2v-1s-1were obtained.Meanwhile, the absorbance spectra turned steeper and the optical band gap red shifted back to the single-crystal value. 全文請(qǐng)?jiān)L問： 掃描探針顯微鏡(SPM/AFM/STM)