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High-quality ZnOfilms grown by atmospheric pressure metalorganic chemical vapor deposition (AP-MOCVD) are demonstrated in this paper. Surface morphology, structural quality and optical properties of the As-grown films were investigated by AFM, double-crystal XRD and photoluminescence (PL) measurements. The effect of buffer layers grown at different temperature on the film quality was studied. It was found that the low-temperature buffer layer was effective to improve the surface morphology, but was not effective to improve the structural quality. On the other hand,the high-temperature buffer layer can greatly improve the structural quality, but yields a relatively rougher surface. Both the samples deposited using either a low-temperature or high-temperature buffer layer showed strong UV luminescence at room-temperature. A fine structure of free excitons was observed at 11K in the sample with a hightemperature buffer layer. 全文請訪問： 掃描探針顯微鏡(SPM/AFM/STM)