The maturation of Scanning Probe Microscopy has yielded an analytical instrument with a wide range of capabilities and applications. The instruments ability to perform ultra-high resolution topographical profi領(lǐng) has been augmented with measurements providing information such as hardness, work function, electric and magnetic field strength, and now also electrical currents, resistance and capacitance. These new capabilities, respectively called Tunne領(lǐng) AFM (TUNA), Scanning Spreading Resistance Microscopy (SSRM), and Scanning Capacitance Microscopy (SCM), provide the ability to measure a wide range of electrical properties on various materials with nanometer- scale resolution. The circuitry for the three techniques is integrated in small modules, which can be mounted on a standard NanoScope® SPM scanner. The MultiMode™, Dimension™ 3100 and 5000 instruments can be equipped with the application modules. Fig. 1 shows the ease of mounting and exchanging an application module on the NanoScope™ Dimension™ SPM scanner.